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Error when installing installation support files on 2008 R2

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I am installing SQL Server 2008 R2 on a Server 2008 R2 machine. I run setup as administrator and I get to the Install Support Files step. It goes through several of the "workflow" steps. When it gets to "ExecuteStandardTimingsWorkflow" step, it throws an error:

"SQL Server Setup failure.

Attempted to Read or Write protected memory. This is often an indication that other memory is corrupt.."

I ran this on several other physical as well as virtual machines and I get the same problem. With SQL 2005, there is a similar issue where it tries to install to a compressed directory and throws the error. 

If this is the same situation, If I can find out what is being installed where during ExecuteStandardTimingsWorkflow I can check that, but if it is something simpler, please advise.


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